6 EZ Polishing Machine
- Model: 6-ez-polishing-machine
Product Description
It’s no secret that SiC is a hard material to process. We understand the challenges of working with SiC and we have applied
our knowledge of SiC grinding, prime wafer polishing, and CMP technology to develop a unique solution that truly makes polishing SiC easy.
- Fully-automated, cassette-to-cassette handling
- Three tables with dedicated carriers, pad conditioners, and pad cleaners